1963

Established Vacuum Laboratory.

1964

Established the first Semiconductor Laboratory in the Republic of China.

1965

Fabricated the first planar bipolar transistor in the Republic of China, and established Semiconductor Research Center (1st Generation).

1966

Fabricated the first integrated circuit in the Republic of China.

1970

Produced the first Ph. D in Engineering in the Republic of China.

1977

Built Semiconductor Research Center Building on Po-Ai Campus (2nd Generation) and officially recognized by the Ministry of Education, Carried out the national large-scale electronics research project, which helped pushing the semiconductor industry into prosperity.

1981

Established Semiconductor Equipment Center by the support from National Science Council.

1989

Started to plan a new laboratory building on Kuang-Fu Campus to support National Nano Device Laboratory (NDL) of National Science Council (NSC) and Semiconductor Research Center (SRC) of National Chiao Tung University (NCTU).

1992

Semiconductor Research Center moved to new Solid-State Electronics Building on Kuang-Fu Campus (3rd Generation) and National Nano Device Laboratory started to operate.

1995

National Chiao Tung University published the most papers in the world in IEEE ED and EDL among all research organizations.

1996

Demonstrated 1-um technology capability in the lab. to celebrate the centennial birthday of National Chiao Tung University.

1997

The research policy of SRC is focusing in 1-um technology also with its wide range application that will co-operate with NDL to service overall semiconductor industry.

1999

Remodeling SRC building in Po-Ai campus for installing the TFT/LCD research center as the subdivision of SRC.

2000

SRC and Charles Evans and Associates (CE&A) establish the premier surface analysis laboratory.

2001

Finished remodeling SRC building on Po-Ai Campus, and established ¡uFlat Panel Display Laboratory¡vand ¡uMicro-Optic-Electr-Mechanical( MOEM) Laboratory ¡vin this building.

2002

Established ¡uNanotechnology Laboratory¡vto support researches supervised by ¡uCenter for Nano Science and Technology¡v.

2003

Semiconductor Research Center was officially entitled ¡uNano Facility Center¡vin February.