Safety

Head Download

MSDS Link

1.Institute of Occupational Safety & Health 

2.MSDS online

3.Vermont SIRI MSDS Collection 

MSDS

Lithography System

1.AZ6112

2.AZ 300 (AZ 6112)

3.AZ 300MIF DEVELOPER

4.AZ_5200

5.FH6400

6.FHD 5(FH 6400)

7.HR-200

8.NBA

9.WNRD

The Other MSDS

1.ACETONE  

2.AMMONIA SOLUTION

3.ACTIC ACID

4.ARGON

5.AMMONIA

6.BORON HYDRIDE

7.Chlorobenzene

8.CHLOROSILANE

9.DISILANCE

10.DICHLOROSILANCE  

11.FH-6400L

12.HYDROGEN FLUORIDE

13.HYDROGEN

14.HYDROGEN PREOXIDE

15.HYDROCHLORIC ACID

16.HELIUM

17.ISOPROPYL ALCOHOL

18.METHYL ALCOHOL

19.NTTRIC ACID

20.NITRIGEN

21.OCD T-12  800

22.OCD T-2  P-43816-SG

23.OCD T-9  145-YM

24.OXYGEN

25.PHOSPHORIC ACID

26.PHOSPHORUS OXYCHLORIDE

27.SULFURIC ACID

28.SILANCE

SOP of Equipment

1.Dual E-Gun Evaporater

2.Furnace 

3.LPCVD

4.Oxidation & Diffusion 

5.PE CVD

6.RTPCVD

7.Sputter

8.Thermal Evaporater

9.Wafer Clean 

Lithography:

1.Aligner

2.Hot Plate

3.HMDS

4.IR

5.Spin Coater

6.Wet Bench