Instrument Manager

Wu, Yew-Chung Lin, Horng-Chih Tsui, Bing-Yue Chang, Kow-Ming Huang, Yang-Tung
Liu, Po-Tsun Chao, Tien-Sheng Cheng, Huang-Chung Cheng, Yu-Ting Yen, Shun-Tung
Chien, Chao-Hsin        

 

Professor Wu, Yew-Chung

NCTU MSE :

[Personal Homepage]

 
Wu, Yew-Chung sermonwu@faculty.nctu.edu.tw
03-5712121ext.31555 03-57247271
Dual beam (focused ion beam & electron beam) System (FIB/SEM)

 

Vice Director

Professor Lin, Horng-Chih

NCTU EE :

[Personal Homepage]

CMOS

Lin, Horng-Chih hclin@faculty.nctu.edu.tw
03-5712121ext.54193 03-5724361

Wet Bench

4-point Probe

Ellipsometer

Surface Profile

 

Director

Professor Tsui, Bing-Yue

NCTU EE :

[Personal Homepage]

 

Plasma process induced damage.,  Electric characterization of low K materials.,  Reliability of Cu-interconnect., Metal gate MOSFET.
Tsui, Bing-Yue

 bytsui@cc.nctu.edu.tw  

03-5712121ext.55601 or 31570 03-5724241

Poly-Si RIE

Dielectric RIE

HDP-RIE

 

Professor Chang, Kow-Ming

NCTU EE :

[Personal Homepage]

Semiconductor Materials and devices, IC Technologies, MEMS 
Chang, Kow-Ming kmchang@faculty.nctu.edu.tw
03-5712121ext.31887 03-5724361
PECVD

 

Professor Huang, Yang-Tung

NCTU EE :

[Personal Homepage]

 

Optoelectronics & Thin Film Tech., Integrated Optics, MEMS 
Huang, Yang-Tung

 huangyt@cc.nctu.edu.tw

03-5712121ext.54138 03-5724241
Laser Pattern Generator
Mask Repeater
Asher and Photo Resist Spinner
Mask Aligner
IR Aligner

 

 

 

Professor Liu, Po-Tsun

NCTU EE :

[Personal Homepage]

 
Liu, Po-Tsun ptliu@mail.nctu.edu.tw
03-5712121ext.52994 03-5737681

Oxidation & Diffusion Furnances

LPCVD

 

Professor  Chao, Tien-Sheng

NCTU EE :

[Personal Homepage]

Physics of Semiconductor Devices
Integrated Circuit Technology
Nano Devices

Chao, Tien-Sheng

tschao@mail.nctu.edu.tw 
03-5712121ext.31367 03-5725235
Atomic Layer Chemical Vapor Deposition System(ALD)

 

Professor Cheng, Huang-Chung

NCTU EE :

[Personal Homepage]

IC Technologies, Semiconductor Devices, Flat-Panel-Display & Thin Film Technology 
Cheng, Huang-Chung hccheng536@mail.nctu.edu.tw
03-5712121ext.54147 or 31577 03-5724361
RAPID THERMAL PROCESSING Chemical Vapor Deposition System (RTP-CVD)
Excimer Laser Annealing System

 

Professor Cheng, Yu-Ting

NCTU EE :

[Personal Homepage]

Nanofabrication technology development for optical, magnetic, and biomedical

applications.

**New hybrid micromachining including design and fabrication of microstructures,

    microsensors and micro actuators processed by silicon surface/bulk

    micromachining; micro molding process or special process for high temperature

    and frequency materials like Metal-Ceramic Composite.

**Micropackaging including design, fabrication, and reliability test of packaging

**techniques for MEMS and Microelectronics applications.

**Advanced Interconnectct Technology. 

**Micro-cooling system.

Cheng, Yu-Ting ytcheng@mail.nctu.edu.tw
03-5712121ext.54169 03-5724361
Dual E-Gun Evaporation System

 

Professor Yen, Shun-Tung

NCTU EE :

[Personal Homepage]

semiconductor laser physics, quantum phenomena in semiconductor nanostructures

semiconductor tera-hertz radiation sources 

Yen, Shun-Tung styen@cc.nctu.edu.tw
03-5712121ext.31471 03-5733722

High-Resolution Scanning Electron Microscope& EDS

Spreading Resistance Profile

 

Professor Chien, Chao-Hsin

NCTU EE :

[Personal Homepage]

 

Chien, Chao-Hsin chchien@faculty.nctu.edu.tw
03-5712121ext.54252  
I-line stepper

Oxidation & Diffusion Furnances

LPCVD

Sputtering System A、 Sputtering System B