Director

Technician

Technology Group 1

Hu, Jack Chen, Ming-Li

Tsai, Ching-Hsiang

Fan, Hsiu-Lan
Huang, Guo-Hua Chao , Jerry    

 

Technology Group 2

Lin, Sheng Chin

Chen, Yueh-Ting

Ni, Yuech Chen Fan, Yang-Chen
Lai, White  Chan, Chia-Chi    

 

 

Technology Group 1

 

Technology group 1 leader

Mr. Hu, Jack

Technology Group1 leader

Operation and maintain of  Poly-RIE、RIE200L、HDP-RIE、P5000E

Hu, Jack

jackhu@faculty.nctu.edu.tw 

office : 03-5712121ext.55607

   lab  : 03-5712121ext.55666

03-5724241

Poly-Si RIE

RIE200L

HDP-RIE

P5000E

deputy

Tsai, Ching-Hsiang  (1st)

Fan, Hsiu-Lan           (2nd)

 

Miss Chen, Ming-Li
Operation and maintain of  Poly-RIE、RIE200L、HDP-RIE、P5000E
Chen, Ming-Li  mlchen@mail.nctu.edu.tw

office :  03-5712121ext.55672

   lab  :  03-5712121ext.55666    

03-5724241

Poly-Si RIE

RIE200L

HDP-RIE

P5000E

deputy

Tsai, Ching-Hsiang (1st)

 

 

Mr. Tsai, Ching-Hsiang
Maintenance and operation of I-line stepperLaser Pattern Generator-2 (DWL-200)
Tsai, Ching-Hsiang chtsai@mail.nctu.edu.tw

office : 03-5712121ext.55605

   lab  :  03-5712121ext.55616

03-5724241

Laser Pattern Generator-2(DWL-200)

I-line stepper

deputy

Huang, Guo-Hua   (1st)

 

Miss Fan, Hsiu-Lan
Operation and maintain of SEM Spreading Resistance Probe System
Fan, Hsiu-Lan lan0808@mail.nctu.edu.tw

office :  03-5712121ext.55672

   lab  :   03-5712121ext.55667

                                ext.55337

03-5724241

(High-Resolution Scanning Electron Microscope & Energy Dispersive Spectrometer)-SEM S-4700I

(Cold Field Emission Scanning Electron Microscope (Hitachi SU8010) & Energy Dispersive Spectrometer)-SEM SU8010
Spreading Resistance Probe System)

deputy

Hu, Jack  (1st)

Chen, Ming-Li (2nd)

 

Mr. Huang, Guo-Hua
Operation and maintain of Laser Pattern Generator-1、Mask Printer
Huang, Guo-Hua guohua@mail.nctu.edu.tw 

office : 03-5712121ext.55605

   lab  :  03-5712121ext.55667

                                or 55609

03-5724241

Laser Pattern Generator-1

Mask Printer

deputy

Chen, Ming-Li    (1st)

Hu, Jack  (2nd)

 

Mr. Chao , Jerry

Operation and maintain of Mask AlignerPhoto Resist SpinnerVacuum OvenOptical Microscope

Chao , Jerry jychaoa@nctu.edu.tw 

office : 03-5712121ext.55670

    lab : 03-5712121ext.55667

03-5724241

Double Side Mask Aligner

Mask Aligner

Photo Resist Spinner

Vacuum Oven

Optical Microscope

deputy

Tsai, Ching-Hsiang   (1st)

Fan, Hsiu-Lan   (2nd)

------------------------------------------------------------------------------------------------------------------------------

Technology Group 2

Technology group 2 leader

Mr. Lin, Sheng Chin

Technology Group2 leader

Operation and maintain of  FIBOxidation & Diffusion FurnancesPECVD4-point ProbeSurface Profile.

Lin, Sheng Chin ck1325@faculty.nctu.edu.tw

office : 03-5712121ext.55668

   lab  : 03-5712121ext.55610

                              ext.55368

03-5724241

Focus Ion Beam System (FIB)

Oxidation & Diffusion Furnances (A)

Oxidation & Diffusion Furnances (B)

deputy

Lai, White  (1st)

Ni, Yuech Chen  (2nd)

 

Miss Chen, Yueh-Ting
Operation and maintain of Dual E-Gun Evaporation SystemThermal Evaporation Coater System
Chen, Yueh-Ting  rene@mail.nctu.edu.tw

office :  03-5712121ext.55671

   lab  :  03-5712121ext.55608

03-5724241

Dual E-Gun Evaporation System

Thermal Evaporation Coater System

deputy

Lin, Sheng Chin (1st)

Chan, Chia-Chi (2nd)

 

Miss Ni, Yuech Chen
Operation and maintain of Sputter System A & B
Ni, Yuech Chen ycni@mail.nctu.edu.tw

office : 03-5712121ext.55669

   lab  :  03-5712121ext.55608

03-5724241

Sputtering System A & B

deputy

Chan, Chia-Chi  (1st)

Fan, Yang-Chen  (2nd)

 

Mr. Fan, Yang-Chen

Operation and maintain of  ALD operationEllipsometer and chemical administer

Fan, Yang-Chen joseph@mail.nctu.edu.tw

office : 03-5712121ext.55671

    lab : 03-5712121ext.55616

03-5724241

ALD operation

Ellipsometer

Chemical administer

deputy

Chen, Yueh-Ting (1st)

Lai, White  (2nd)

 

Mr. Lai, White

Operation and maintain of LPCVD and Wet Bench

Lai, White white@nctu.edu.tw

office :  03-5712121ext.55606

   lab  :  03-5712121ext.55616

03-5724241

Wet Bench

LPCVD

deputy

Fan, Yang-Chen  (1st)

Lin, Sheng Chin   (2nd)

 

Miss Liu, Yueh-En
Operation and maintain of Focus Ion Beam System management
Liu, Yueh-En graceful@mail.nctu.edu.tw

office : 03-5712121ext.55669

   lab  :  03-5712121ext.55368

03-5724241
Focus Ion Beam System (FIB)
deputy

Lai, White            (1st)

Lin, Sheng Chin  (2nd)

 

Mr. Chan, chia-chi
Operation and maintain of ALDLPCVD、puttering System AEllipsometer System management
Chan, chia-chi chiachichan@nctu.edu.tw

office : 03-5712121ext.55622

   lab  :  03-5712121ext.55610

                               ext.55608

03-5724241
Atomic Layer Chemical Vapor Deposition System, ALD
Low Pressure Chemical Vapor Deposition, LPCVD
Sputtering System A
Ellipsometer
deputy

Ni, Yuech Chen   (1st)

Chen, Yueh-Ting (2nd)

Instrument Manager

Technology Group

Facility

Industrial Sfety

Administrative Assistant

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