Thermal Evaporation Coater     

        

     update:2016/01/25         

Instrument name Thermal Evaporation Coater
Brand Model

ULVAC EBX-6D

Purchase Date

1993/5

Seat

Solid-State Electronics Building 3F (TEL:55608

Services

Al film deposition

Specifications

1. Al film deposition.

2. Put Al slug on the W boat, the Al slug will evaporate.

3. Substrate:4  inch  × 8 or 6 inch  × 5.

Open Level

Open Level, Open people

Contact people

1.Professor:Cheng, Yu-Ting   (TEL:03-5712121-54169)

2.Maintenance Technician: Chen, Yueh-Ting   (TEL:03-5712121-55671, 55608) 

3.Instrument Operator:Chen, Yueh-Ting   (TEL:03-5712121-55671, 55608)

Operation appointment

National Sceince Council

The Instruments Information System

Original Equipment Manufacturer

Training Manual &

Quality Examination

Training Manual

Quality Examination

Charge Fee
 

School

Research Institute

Commercial Agenc
Original Equipment Manufacturer (NT$) 900 - -

Primary charge (NT$)

4000

4500

5000

Material charge < 5KA (NT$)

1000

1000 1000
Material charge 5KA~10KA (NT$)

2000

2000

2000