High-Resolution Scanning Electron Microscope &

 Energy Dispersive Spectrometer

        

     update:2016/01/25         

Instrument name High-Resolution Scanning Electron Microscope & Energy Dispersive Spectrometer (SEM & EDS)
Brand Model

Hitachi S-4700I

Purchase Date

1999/5/1

Seat

Microelectronics and Information Systems Research Building, 710R (TEL:55676

Services

1.SEM

2.EDS

Specifications

1.Electron Source:Cathode Electronic Gun

2.Voltage:0.5kV~30kV

3.Sample Size:25mm diameter x 10mm(t)

4.Resolution:15 A° (at 15kV) or 25A° (at 1kV)

5.5 hundred thousand's magnification (Good Image : hundred thousand's magnification)

6.Second Electron Resolution : 1.5nm(15kV)

7.EDS(B5~U92

Open Level

Open Level, Open people

Contact people

1.Professor:Yen, Shun-Tung   (TEL:03-5712121-31471)

2.Maintenance Technician: Wang, Sheng-Ying   (TEL:03-5712121-55676) 

3.Instrument Operator: Wang, Sheng-Ying   (TEL:03-5712121-55676)

Training Manual &

Quality Examination

Charge Fee

Note : Self-Prepared following items

1.MO or Disc, USB

2.Thermal Paper(K65HM)

 

School

Research Institute

 

Commercial Agency

 

 

on-campus

off- campus

Original Equipment Manufacturer  (NT$/hr)

900 - -

Primary charge (NT$/hr)

250

500

3500

4000

Coating (NT$/unit)

150

200

500

500

EDS (NT$/dot)

150

200

500

500