Reflectometer                 

                  

              update:2016/02/01                

Instrument name

Reflectometer

Brand Model SR-SEMI_RTC11001U

Purchase Date

2015
Seat

Solid-State Electronics Building 1F 135R (TEL:55609)

Services

Measurement SiO2, Si3N4, Poly-Si, TEOS…. (Transparent film)

Sample SizeMix. 6 inch

Specifications

1.In the same layer, you can simulate the mixing ratio of two kinds of different materials.

2.Can simulate the phenomenon of uneven rough surface of the film.

3.The three-layer film can be measured.

4.The built-in database of approximately 100 groups provide a refractive index n and extinction coefficient k value.

5.Coordinate the establishment of a variety of different patterns.

6.The multi-point automatic measurement.

7.Using the cross mirror confirm standard reference sample and samples working distance whether the same.

8.Raditech software can choose operator mode and engineer mode.

9.We can use remote desktop connection to support measurement and training

Open Level

Open Level, Open people

Contact people

1.Professor:Chao, Tien-Sheng  (TEL:03-5712121-31367)

2.Maintenance Technician: Lai, White (TEL:03-5712121-55606、55616)

3.Instrument Operator: Lai, White (TEL:03-5712121-55606、55616)

Original Equipment Manufacturer

[download]

 Training Manual &QualityExamination

Charge Fee
 

School

Research Institute

Commercial Agency

Primary charge (NT$)

600

850 1000
  150 360 500
  120 180 250