Die-electric Material RIE 200L



Instrument name Die-electric Material RIE 200L
Brand Model

SamCo RIE200L

Purchase Date

Seat Solid-State Electronics Building 1F 116R (TEL:55666


SiO2, Si3N4 etching


1. Etching materials:SiO2 and Si3N4.

2. system features: One load lock chamber, one  etch  chamber and three vacuum pumps.

3. Maximum RF (13.56 MHz) output power: 300 W.

4. Operation modes: Automatic or manual.

Open Level

Open Level, Open people

Contact people

1.Professor:Tsui, Bing-Yue  (TEL:03-5712121-31570)

2.Maintenance Technician: Hu, Jack  (TEL03-5712121-5560755666)

3.Instrument Operator: Chen, Ming-Li   (TEL:03-5712121-55672, 55666)

Operation appointment

National Sceince Council

The Instruments Information System

Original Equipment Manufacturer

Training Manual &

Quality Examination

Charge Fee


Research Institute

Commercial Agency

Original Equipment Manufacturer(NT$/2hr) 900 - -

Primary charge (NT$)

2070 2070 2070

Operating charge


2070 2070 2070