I-line Stepper

                  

              update:2016/01/25                

Instrument name I-line Stepper
Brand Model

ASML PAS-5000

Purchase Date

2006
Seat Solid-State Electronics Building 10Class 139R (TEL:55616

Services

1. IP-3650 PR

2.Wafer size 4"

3. 5mask,align mark

Specifications

1. I-line 365 nm wavelength.

2. Image resolution: 0.5 μm .

3 .Optics image Reduction: 5X.

4 .Wafer size : 4 inch.

Open Level

Open Level, Open people

Contact people

1.Professor:Hou, Tuo-Hung (Alex)    (TEL:03-5712121-54261)

2.Maintenance Technician: Tsai, Ching-Hsiang   (TEL:03-5712121-55605, 55616)

3.Instrument Operator: Tsai, Ching-Hsiang   (TEL:03-5712121-55605, 55616)

Operation appointment

National Sceince Council

The Instruments Information System

Original Equipment Manufacturer

Training Manual &

Quality Examination

Charge Fee
 

School

Research Institute

Commercial Agency

Primary charge(NT$/min) 150 150 300