Dual E-Gun Evaporation System 

        

     update:2016/01/25         

Instrument name Dual E-Gun Evaporation System
Brand Model

ULVAC EBX-10C

Purchase Date

1997/6

Seat

Solid-State Electronics Building 3F (TEL:55608

Services

Film deposition

Specifications

1. EB gun model EGK-3M  × 2.5 kW EB power.

2. Substrate: (4 inch  × 18) or (6 inch  × 3 + 4 inch × 6).

3. Multi-layer deposition.

Open Level

Open Level, Open people

Contact people 1.Professor:Cheng, Yu-Ting   (TEL:03-5712121-54169)

2.Maintenance Technician: Chen, Yueh-Ting   (TEL:03-5712121-55671, 55608) 

3.Instrument Operator:Chen, Yueh-Ting   (TEL:03-5712121-55671, 55608)

Operation appointment

National Sceince Council

The Instruments Information System

Original Equipment Manufacturer

Training Manual &

Quality Examination

Charge Fee
 

School

Research Institute

Commercial Agency

Original Equipment Manufacturer (NT$)

900 - -

Primary charge (NT$)

5000

6000

7000

Note : Maximum loading for 4 inch or 3 inch (18pics)
                                                   6 inch (3pics) + 4 inch or 3 inch (6pics)

Material

Charge

Material Charge
Co

NT$500/KA

Ni NT$400/KA
W NT$500/KA Si NT$400/KA
Ti NT$600/KA Si3N4 NT$800/KA
Pt

NT$6000/KA

Ge NT$600/KA
SiO2 NT$500/KA Cr NT$600/KA
Mo NT$500/KA Pd NT$800/KA
MgF2

Self-Prepared