Dual E-Gun Evaporation System (B) 

        

     update:2016/01/25         

Instrument name Dual E-Gun Evaporation System (B)
Brand Model

ULVAC EBX-10C

Purchase Date

1997/6

Seat

Solid-State Electronics Building 3F (TEL:55608

Services

Film deposition

Specifications

1.EB gun Model EGL-3M * 2.5kw EB power

2.Cryo pump U-10 pu(2300 L/S N2), pressure 3.0E-7 Torr (Minimum)

3.Substrate Size:4", 6"

Open Level

Open Level, Open people

Contact people

1.Professor:Cheng, Yu-Ting   (TEL:03-5712121-54169)

2.Maintenance Technician: Wen, Herman (TEL:03-5712121-55613, 55608) 

3.Instrument Operator: Wen, Herman (TEL:03-5712121-55613, 55608)

Operation appointment

National Sceince Council

The Instruments Information System

Original Equipment Manufacturer

Training Manual &

Quality Examination

Charge Fee
 

School

Research Institute

Commercial Agency

Original Equipment Manufacturer (NT$)

900 - -

Primary charge (NT$)

5000

6000

7000

Note : Maximum loading for 4 inch (18pics) or 6 inch (9pics)

Material

Charge

Material Charge
Co

NT$500/KA

Ni NT$400/KA
W NT$500/KA Si NT$400/KA
Ti NT$600/KA Si3N4 NT$800/KA
Pt

NT$6000/KA

Ge NT$600/KA
SiO2 NT$500/KA Cr NT$600/KA
Mo NT$500/KA Pd NT$800/KA
MgF2

Self-Prepared