E/B Gun Coater

        

     update:2011/09/06         

Instrument name E/B Gun Coater
Brand Model

VTI E/B GUN COATER

Purchase Date

1994/4

Services

Film deposition

Specifications

1.EB gun Model EGK-3M*2.5kw EB power

2.Cryo pump Torr -8

3.Substrate Size:3", 4"

Contact people

1.Professor:Chien, Chao-Hsin   (TEL:03-5712121-54252)

2.Maintenance Technician: Hsu, Jun-Sheng  (TEL:03-5712121-55618, 54183)

3.Instrument Operator: Hsu, Jun-Sheng  (TEL:03-5712121-55618, 54183)

Original Equipment Manufacturer [download]
Charge Fee
 

School

Research Institute

Commercial Agency

Original Equipment Manufacturer(NT$)

900 - -

Primary charge (NT$)

5000

6000

7000

 

Material

Charge

Ti 600元/KA
Cr 600元/KA
AL 600元/KA
Au 10000元/KA