Machine

List of Facility & Equipment

Wet Bench

1

Wet Bench

Furnace Systems

1

Oxidation & Diffusion Furnaces (A)

2

Oxidation & Diffusion Furnaces (B)

Chemical Vapor Deposition Systems

1

Low Pressure Chemical Vapor Deposition, LPCVD

2

Plasma-Enhanced Chemical Vapor Deposition, PECVD

3

Atomic Layer Chemical Vapor Deposition System, ALD

Lithography Systems

1

Laser Pattern Generator L

2

Laser Pattern Generator , DWL-200

3

Mask Aligner  

4

Double Side Mask Aligner

5

I-line Stepper

6

Photo Resist Spinner

7

Vacuum Oven

8

Optical Microscope

Dry Etch Systems

1

Poly-Si Reactive Ion Etching System, Poly-Si RIE

2

Dielectric Reactive Ion Etching System, RIE 200L

3

High Density Plasma Reactive Ion Etching System, HDP-RIE

4

Multi-chamber Plasma Etching System, P5000E

Vacuum Deposition Systems

1

Thermal Evaporation Coater

2

Dual E-Gun Evaporation System (A)

3

Dual E-Gun Evaporation System (B)

4

E/B Gun Coate

5

Sputtering System A

6

Sputtering System B

Analysis Systems

1

Dual beam (focused ion beam & electron beam) System, FIB

2

SEM SU-8010 (Cold Field Emission Scanning Electron Microscope (Hitachi SU8010) & Energy Dispersive Spectrometer)

3

SEM-4700I (High-Resolution Cold Field Emission Scanning Electron Microscope & Energy Dispersive Spectrometer, SEM, EDS)

4 Reflectometer

5

Spreading Resistance Probe System

6

4-point Probe

7

Ellipsometer

8

Surface Profile