In recent years, semiconductor industry has been one of the main cornerstones of the economic development in the Republic of China. Nowadays, in the rapid development of technology and with the keen competition among enterprises, the education in technology is of paramount importance. Nano Facility Center at National Chiao Tung University, which has long been one of domestic laboratories with best equipments and manpower in semiconductor, will continue to seek prominence in working for the objective of providing best education, training, and services in semiconductor technology so that the research in this field will be promoted and the related industry will be elevated.