Operation Manual & Qualification Record Sheet

Machine

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Wet Bench

Operation Manual Qualification Record Sheet

Oxidation & Diffusion Furnaces

Operation Manual Qualification Record Sheet

Plasma-Enhanced Chemical Vapor Deposition, PECVD

Operation Manual Qualification Record Sheet

Atomic Layer Chemical Vapor Deposition System, ALD

Operation Manual Qualification Record Sheet

UV Ozone Dry Stripper

Operation Manual Qualification Record Sheet

Lithography include:

Mask Aligner, Photo Resist Spinner, Vacuum Oven, Optical Microscope

Operation Manual Qualification Record Sheet

Poly-Si Reactive Ion Etching System, Poly-Si RIE

Operation Manual Qualification Record Sheet

Dielectric Materials Reactive Ion Etching System, RIE 200L

Operation Manual Qualification Record Sheet

High Density Plasma Reactive Ion Etching System, HDP-RIE

Operation Manual Qualification Record Sheet

Multi-Chamber Plasma Etching System, P5000E

Qualification Record Sheet

Dual E-Gun Evaporation System A

Operation Manual Qualification Record Sheet

High-Resolution Cold Field Emission Scanning Electron Microscope & Energy Dispersive Spectrometer, SEM, EDS

Operation Manual Qualification Record Sheet

Ellipsometer

Operation Manual Qualification Record Sheet

Thermal Evaporation Coater

Operation Manual Qualification Record Sheet

Sputtering System A

Operation Manual Qualification Record Sheet

Sputtering System B

Operation Manual Qualification Record Sheet